| 1. | Plasma characteristics of a rf ion source are investigated by emission spectroscopy . the spatiotemporal spectral line intensities of the first three atomic lines in hydrogen bahner series ( = 656 . 28 , 486 . 13 , 434 . 05nm ) of rf ion source plasma , are measured with calibrated optical multichannel analyzer ( oma ) . some plasma parameters , including electron temperature , hydrogen atom density and hydrogen ion density , are calculated and analyzed using partial local thermodynamic equilibrium ( plte ) theory and abel transform
实验采用绝对定标后的光学多道分析系统( oma )测定了离子源等离子体不同时间和空间位置的氢原子巴耳末谱线系中前三条谱线( = 656 . 28 , 486 . 13 , 434 . 05nm )的强度，并采用plte的理论和abel变换方法，计算出了高频离子源等离子体的电子温度、氢原子浓度、氢离子浓度等参数在放电的不同阶段和径向分布情况，并进行了简要分析。 |
